東京大学 ナノ量子情報エレクトロニクス研究機構 量子ドットラボ Quantum Dot Laboratory

成長装置 (Equipment for growth process)

Molecular Beam Epitaxy

 

Molecular Beam Epitaxy

Molecular Beam Epitaxy

Molecular Beam Epitaxy

Metal Organic Chemical Vapor Deposition

 

測定・評価装置 (Equipment for measurement)

High-resolution Scanning Electron Microscope (SEM+STEM+EDX)

High-resolution X-ray Diffractmeter (XRD)

Atomic Force Microscope (AFM)

Laser System ( Ti:sapphire laser system ) Equipment for Spectroscopy

 

プロセス装置 (Equipment for device process)

Manipulation System Microscope using SEM

Transfer printing apparatus

Thickness Mater using Optical interference

Electron Beam Lithography Systems (EB)

Mask-less Laser Lithography System

ICP Reactive Ion Etching Systems

Sputtering systems and Electron Beam vapor deposition systems